Sputtering High Temperature Superconducing Thin Films: YBa₂Cu₃O₇

A. Eymen Hammas

Advisor: Dr. Joseph C. Amato

Abstract

High temperature superconductors are of interest because of their industrial applications and there is yet no satisfactory theory explaining high temperature superconductivity. The aim of the project has been to obtain a YBa₂Cu₃O₇ superconducting thin film by off-axis sputtering from a target composed of the same elements. Since this process requires high temperature (~700¡C) a substrate heater has been designed, built and tested.